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Search Results - jose+mapas
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Sub-5 nm Pitch Lamellar Microdomains by Chemical Transformations
A method of fabricating microphase separated block copolymer thin films with ordered, sub-5 down to sub-3 nm full pitch lamellar microdomains. Background: Current photolithographic processes are generally unable to achieve size scale features in the single nanometer range, which is highly desirable for microelectronic and storage devices. While...
Published: 6/19/2026
|
Updated: 6/28/2018
|
Inventor(s):
Javid Rzayev
,
Thomas Russell
,
Duk Man Yu
,
Jose Mapas
Keywords(s):
Technologies
Category(s):
Technology Classifications > Materials and Chemicals
,
Campus > University at Buffalo