Additively Manufactured/ 3D Printed Resonant MEMS Device and a Resonant MEMS Array

Advantages

• Enables complex 3D device shapes impossible through traditional flat manufacturing methods
• Supports diverse materials for flexible integration across many substrate types
• Cuts development time and costs by removing expensive fabrication tooling needs
• Boosts performance and signal clarity through smarter resonator design features

Summary

As electronics evolve toward wearable and flexible formats, MEMS resonators face a critical design bottleneck. Conventional manufacturing locks devices into flat, two-dimensional shapes using costly tooling and a narrow range of silicon-based materials. This rigidity blocks the three-dimensional architectures, exotic materials, and conformal designs that next generation applications urgently require.

This technology applies additive manufacturing to build resonant MEMS devices layer by layer, combining electrodes, piezoelectric material, and structural elements on rigid or flexible substrates. By moving beyond subtractive fabrication, it unlocks complex 3D geometries, broader material choices, and faster prototyping. Built in features like modified anchors and reflectors boost performance, while easy array printing strengthens signal quality, offering real advantages for telecommunications, defense, and healthcare partners.

Desired Partnerships

• License
• Sponsored Research
• Co-Development